{"id":1124,"date":"2021-09-28T01:22:57","date_gmt":"2021-09-28T01:22:57","guid":{"rendered":"https:\/\/science.utm.my\/physics\/?page_id=1124"},"modified":"2021-09-28T01:39:02","modified_gmt":"2021-09-28T01:39:02","slug":"magnetron-sputtering","status":"publish","type":"page","link":"https:\/\/science.utm.my\/physics\/magnetron-sputtering\/","title":{"rendered":"MAGNETRON SPUTTERING"},"content":{"rendered":"

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MAGNETRON SPUTTERING<\/span><\/h1>\n

[\/et_pb_text][et_pb_image src=”http:\/\/science.utm.my\/physics\/wp-content\/uploads\/sites\/593\/2021\/09\/Magnetron-Sputtering.png” _builder_version=”4.10.8″ _module_preset=”default” title_text=”Magnetron Sputtering” align=”center” hover_enabled=”0″ sticky_enabled=”0″][\/et_pb_image][et_pb_text _builder_version=”4.10.8″ background_size=”initial” background_position=”top_left” background_repeat=”repeat” hover_enabled=”0″ global_colors_info=”{}” custom_padding=”||50px||false|false” sticky_enabled=”0″]<\/p>\n

 <\/p>\n

Brand-Model
<\/b>MSS LAB350, MAGNETRON SPUTTERING<\/span><\/p>\n

Descriptions
<\/b>Pumping system; Rotary pump (WSA W2V20, 200 L\/min, Dual stage, 220V), Turbo pump: Leybold Turbovac 350i, 350 L\/min, 10A\/24V), System pressure ( xE-5 Torr within 30 minutes). Generally, cooling at outer side, Mounting on ISO 200-K flange.<\/span><\/p>\n

Specifications
<\/b>Stage size: Up to 4\u201d diameter
<\/span>Rotation: Variable up to 20 rpm
<\/span>Heating: MoSi Heating Element
<\/span>Heating range: 150\u00b0C-800\u00b0C
<\/span>Bias capability: RF Bias to 30W
<\/span>Thickness monitor: Inficon SQM-160. Quartz Crystal Sensor
<\/span>Process Gas: Ar, O2, N2\/MFC Unit<\/span><\/p>\n

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MAGNETRON SPUTTERING  Brand-ModelMSS LAB350, MAGNETRON SPUTTERING DescriptionsPumping system; Rotary pump (WSA W2V20, 200 L\/min, Dual stage, 220V), Turbo pump: Leybold Turbovac 350i, 350 L\/min, 10A\/24V), System pressure ( xE-5 Torr within 30 minutes). Generally, cooling at outer side, Mounting on ISO 200-K flange. SpecificationsStage size: Up to 4\u201d diameterRotation: Variable up to 20 rpmHeating: MoSi […]<\/p>\n","protected":false},"author":273,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"

\u00a0<\/p>

Brand-Model
<\/b>MSS LAB350, MAGNETRON SPUTTERING<\/span><\/p>

Descriptions
<\/b>Pumping system; Rotary pump (WSA W2V20, 200 L\/min, Dual stage, 220V), Turbo pump: Leybold Turbovac 350i, 350 L\/min, 10A\/24V), System pressure ( xE-5 Torr within 30 minutes). Generally, cooling at outer side, Mounting on ISO 200-K flange.<\/span><\/p>

Specifications
<\/b>Stage size: Up to 4\u201d diameter
<\/span>Rotation: Variable up to 20 rpm
<\/span>Heating: MoSi Heating Element
<\/span>Heating range: 150\u00b0C-800\u00b0C
<\/span>Bias capability: RF Bias to 30W
<\/span>Thickness monitor: Inficon SQM-160. Quartz Crystal Sensor
<\/span>Process Gas: Ar, O2, N2\/MFC Unit<\/span><\/p>","_et_gb_content_width":"","footnotes":""},"class_list":["post-1124","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/pages\/1124","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/users\/273"}],"replies":[{"embeddable":true,"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/comments?post=1124"}],"version-history":[{"count":4,"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/pages\/1124\/revisions"}],"predecessor-version":[{"id":1142,"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/pages\/1124\/revisions\/1142"}],"wp:attachment":[{"href":"https:\/\/science.utm.my\/physics\/wp-json\/wp\/v2\/media?parent=1124"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}